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JETP, Vol. 81, No. 2, p. 367 (August 1995)
(Russian original - ZhETF, Vol. 108, No. 2, p. 676, August 1995 )

Formation of polyatomic ions during the sputtering of multicomponent oxides
I. Yu. Panichkin, S.P. Chenakin

Received: October 20, 1994

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