ZhETF, Vol. 60,
No. 4,
p. 1393 (October 1971)
(English translation - JETP,
Vol. 33,
No. 4,
p. 753,
October 1971
)
The issue content is only available in english translation.
Mechanism of Formation of the Ion Component in Cathode Sputtering of Metals
V.I. Veksler, B.A. Tsipinyuk
Received: September 18, 1970
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